9_T_Ohmi_tohokuUniv.pdf (application/pdf 객체)

9_T_Ohmi_tohokuUniv.pdf (application/pdf 객체).

  • 4 input 10 stage CMOS NOR circuit as critical path model
  • Si (551) surface : 8 degree off in the direction of [001] from Si (110) surface –> atomically smooth interface
  • First Step:
    Balanced CMOS consisting of Accumulation
    Mode n-MOS Transistor and Inversion Mode p-
    MOS Transistor on (551) surface SOI wafer (2D)
  • Second Step:
    Balanced CMOS consisting of 3D Accumulation
    Mode n-MOS and 2D Accumulation Mode p-MOS
    Transistor on (551) surface SOI wafer
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